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SOURCE OF ERROR IN IMAGE MEASURING INSTRUMENT
Author:管理員 ?? Posted on:2019-04-12 15:27:07 ?? Text:【Big】【Medium】【Small】Browse (3869)

      In the technical parameters of the image measuring instrument, we often see the data of (3+L/200)um, which is the measurement accuracy of the image measuring instrument. How is it obtained? This is our new contact image measuring instrument. A doubt in the hearts of customers.
       To understand the measurement accuracy of an image measuring instrument, it is necessary to know the source of the image measuring instrument error. Measurements on the image measuring instrument are measured in single-axis or two-dimensional plane coordinates. When measuring, focus first, then align, read (count), and finally calculate. The readings come from the scale, the grating system, the focus alignment depends on the optical imaging system, and there is an illumination source that directly affects the measurement and accuracy, because the instrument based on the image method, if the device under test cannot be effectively and correctly illuminated, The result of the measurement obviously deviates from its true size. In addition to the aforementioned factors, environmental conditions are also factors that can not be ignored in measuring measurement accuracy. Based on the above analysis, we can summarize the sources of error in several aspects.
   1) the error of the scale counting;
   2) The error caused by the straightness and the angular pendulum that exist when the table moves;
   3) The error of the perpendicularity band of the two measuring axes of the workbench;
   4) The error between the optical axis of the lens and the non-perpendicular band of the table;
   5) Measuring the error caused by changes in ambient temperature;
   6) Focus and alignment errors caused by changes in lighting conditions of the light source.
   Among these factors, the first four errors are hardware errors, which have been formed and fixed in the manufacturing process of the image measuring instrument. Generally, they cannot be changed. The error caused by the temperature influence must be controlled by the temperature and isothermal process of the measuring chamber. To reduce its impact.
      The last item is often overlooked. In actual measurement, when the lighting conditions of the light source change, the lighting effect and image quality of the measured workpiece are directly affected, mainly because the image of the image measuring instrument is received by the CCD, although the CCD has an automatic The function of adjusting the gain, but when the brightness is too large, the adjustment function is lost, resulting in the image of the workpiece being measured being reduced. When the brightness is too low, the image of the workpiece becomes larger.
This effect, when measuring the spacing between repeated graphic structures, as long as the illumination conditions remain constant throughout the measurement process, the effect can be neglected, because each repeated graphic structure is becoming larger or smaller at the same time, the measurement of the spacing The calculation directly eliminates the effects of image distortion, such as measuring the distance between the glass ruler and the grid plate; in addition to this special case, such as measuring the diameter of the circle, the length and width of the workpiece, will bring significant errors.


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